Electronic sensing circuitry and micro-electromechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M/sup 3/EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.
Integrated micro-electro-mechanical sensor development for inertial applications
1998-01-01
729589 byte
Conference paper
Electronic Resource
English
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