Electronic sensing circuitry and micro-electromechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M/sup 3/EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.


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    Title :

    Integrated micro-electro-mechanical sensor development for inertial applications


    Contributors:
    Allen, J.J. (author) / Kinney, R.D. (author) / Sarsfield, J. (author) / Daily, M.R. (author) / Ellis, J.R. (author) / Smith, J.H. (author) / Montague, S. (author) / Howe, R.T. (author) / Boser, B.E. (author) / Horowitz, R. (author)


    Publication date :

    1998-01-01


    Size :

    729589 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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