Summary form only given. In this study we design, fabricate, and characterize tunable "membrane" VCSELs using novel micro-electro-mechanical systems (MEMS) piston micromirror designs that include metal or hybrid metal/dielectric top flexures. The device structures start as conventional 980 nm resonant cavity light-emitting diodes (RCLEDs) with selectively oxidized AlGaO current apertures. We use a photosensitive spin-on polymer (polymethylglutarimide - PMGI) material as the sacrificial material between the RCLED and the upper flexure. Up to seven photolithographic mask steps are used to define/create mesas.


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    Title :

    Micro-electro-mechanical tunable vertical cavity surface emitting lasers using metal flexures and a top dielectric stack distributed Bragg reflector


    Contributors:
    Harvey, M.C. (author) / Lott, J.A. (author) / Nelson, T.R. (author) / Stintz, A. (author) / Malloy, K.J. (author)


    Publication date :

    2002-01-01


    Size :

    146931 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Leaky-Mode Coupled Vertical-Cavity Surface-Emitting Lasers Fabricated using a Dielectric Distributed Bragg Reflector

    Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers) | British Library Conference Proceedings | 2004



    MEM-Tunable VCSELs Using Metal Flexures and a Top Dielectric Stack DBR

    Institute of Electrical and Electronics Engineers | British Library Conference Proceedings | 2002