The dimensions of a CMOS-MEMS Z-axis accelerometer are varied in a parametric study that pursues to explore the design space of the spring stiffness that can be achieved by this device. The results of the spring stiffness obtained via simulation will be compared to the one obtained via analytical results, to evaluate the accuracy obtained by using the analytical formulas.
Design Space Exploration of Z-Axis CMOS-MEMS Accelerometers
2010-09-01
497469 byte
Conference paper
Electronic Resource
English
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