A three-dimensional profile measurement system employing a spectral interferometer and a nonlinear /spl beta/-barium borate (BBO) crystal is constructed. The measurement result of the surface structure of the stepped surface object is shown.


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    Title :

    Spectral interferometric tomography with optical nonlinearity


    Contributors:
    Sutoh, Y. (author) / Yasuno, Y. (author) / Itoh, M. (author) / Mori, M. (author) / Yatagai, T. (author)


    Publication date :

    2001-01-01


    Size :

    158815 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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