A highly ordered nanohole-array architecture with high aspect ratios was fabricated based on the anodization of Al. In the report, two types of fabrication processes for highly ordered nanohole arrays, and their application to several kinds of nanofabrication for optical devices are described.


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    Title :

    Highly ordered hole-array architecture in anodic alumina for optical devices


    Contributors:
    Masuda, H. (author) / Asoh, H. (author) / Ohya, M. (author) / Nakao, M. (author) / Yokoo, A. (author) / Tamamura, T. (author) / Nishio, K. (author)


    Publication date :

    2001-01-01


    Size :

    350545 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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