We have been developing a high repetition (5 kHz) and high power (5 kW) Nd: YAG laser system pumped by cw LDs for EUV lithography. Design concepts and experimental results will be reported.


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    Title :

    High Power and High Repetition Nd: YAG Laser Pumped by cw Laser Diodes


    Contributors:
    Fujita, H. (author) / Nakatsuka, M. (author) / Tao Wang, (author) / Tsubakimoto, K. (author) / Fujimoto, Y. (author) / Yoshida, H. (author) / Miyanaga, N. (author) / Izawa, Y. (author) / Matsuoka, S. (author) / Kubomura, H. (author)


    Publication date :

    2005-01-01


    Size :

    885287 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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