High sensitive pyroelectric thin films have been grown for IR sensor. The thin films comprise single c-domain / single crystal of lead titanate (PT) fabricated on MgO substrates by a magnetron sputtering at 600°C followed by a rapid cooling. The PT thin films showed pyroelectric coefficient ¿=3×108C/cm2·K with voltage sensitivity ¿/¿=0.5×l09C/cm2·K. The sensitivity was one order in magnitude higher than PZT ceramics.
Single c-domain lead titanate thin films for pyroelectric IR sensors
2006-09-01
1231861 byte
Conference paper
Electronic Resource
English
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