Microelectromechanical systems (MEMS) combined with optical components add optical functionality to devices and lead to the terms optical MEMS or MOEMS. The underlying technology of the presented devices is silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting monolithic bulk silicon structures for commercial devices with the advantage of being very insensitive to temperature changes. The particular strength of the technology is monolithic horizontal and vertical micromirrors for a variety of applications.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics


    Contributors:
    Noell, W. (author) / Sun, W. (author) / de Rooij, N. (author) / Herzig, H.P. (author) / Manzardo, O. (author) / Dandliker, R. (author)


    Publication date :

    2002-01-01


    Size :

    247189 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




    Application oriented complex polymer microoptics

    Braeuer, A. / Dannberg, P. / Zeitner, U. et al. | British Library Online Contents | 2003


    Collective Microoptics on Fiber Ribbon for Optical Interconnecting Devices

    Chanclou, P. / Thual, M. / Lostec, J. et al. | British Library Online Contents | 1999


    Photolithographic Processing of Hybrid Glasses for Microoptics

    Karkkainen, A. H. O. / Rantala, J. T. / Tamkin, J. M. et al. | British Library Online Contents | 2003


    Improving Photodetector Performance by Means of Microoptics Concentrators

    Donati, S. / Martini, G. / Randone, E. | British Library Online Contents | 2011