The optical MEMS pressure sensor with a planar and mesa membrane is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Parot (F-P) interference and the relation between deflection and pressure is analyzed. The fabrication of each diaphragm is described. A phase demodulation method based on a Fourier transformation is explored, which can reduce errors resulting from intensity variations of a light source. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity, and a wide pressure measurement range.


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    Title :

    A Study of Fabry-Perot Optical MEMS Pressure Senor


    Contributors:
    Wang, Ming (author) / Ge, Yixian (author) / Yan, Haitao (author)


    Publication date :

    2008-12-01


    Size :

    372889 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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