Recent progress on the realization of a silicon integrated biophotonic chip using plasma etching and laser ablation is presented. The chip utilizes films of SU-8 and UV-15 polymer material. An intersecting optical waveguide and microfluidic channel exhibiting good optical transmission across the channel is demonstrated.
Integration of microfluidic channels and optical waveguides using low-cost polymer microfabrication techniques
2004-01-01
308448 byte
Conference paper
Electronic Resource
English
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