Recent progress on the realization of a silicon integrated biophotonic chip using plasma etching and laser ablation is presented. The chip utilizes films of SU-8 and UV-15 polymer material. An intersecting optical waveguide and microfluidic channel exhibiting good optical transmission across the channel is demonstrated.


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    Title :

    Integration of microfluidic channels and optical waveguides using low-cost polymer microfabrication techniques


    Contributors:
    Mitchell, A. (author) / Holland, A. (author) / Vora, K. (author) / Ghantasala, M.K. (author)


    Publication date :

    2004-01-01


    Size :

    308448 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English





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