Layered Surface Acoustic Wave (SAW) transducers were fabricated and modelled by finite-element method. A comparison of the frequency response of the measured devices and simulated structures are presented. The transducer structure is based on a two-port delay line, employing x-cut, y-propagating lithium niobate (LiNbO/sub 3/) substrate and a thin film zinc oxide (ZnO) guiding layer. A finite-element approach was employed to simulate a 3-dimensional version of the fabricated device. A transient analysis was conducted, where electrical and mechanical boundary values were applied. Simulation results show good agreement with experimental results, indicating that a finite-element approach is appropriate for modelling layered SAW transducers.


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    Title :

    A finite element approach for 3-dimensional simulation of layered acoustic wave transducers


    Contributors:


    Publication date :

    2002-01-01


    Size :

    250231 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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