In this work we will present recent results on micromachining of fused silica and different glasses. An excimer laser running at /spl lambda/=248 nm (KrF) or /spl lambda/=351 nm (XeF) (/spl tau//sub p/=20 ns) was used for the experiments. Various solutions of acetone, toluene and tetrachloroethylene containing pyrene in different concentrations (0.1 - 0.5 M [mol/l]) have been applied for studying the etching process. In this case the precise control of the depth as well as the high surface quality allows optical applications such as rapid prototyping of diffractive optical devices.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Laser fabrication of micro sized diffractive and refractive optical devices in fused silica and glass


    Contributors:
    Bohme, R. (author) / Zimmer, K. (author)


    Publication date :

    2003-01-01


    Size :

    72895 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




    Fabrication of Refractive and Diffractive Micro-Optical Structures in Diamond

    Karlsson, M. / Nikolajeff, F. / Optical Society of America | British Library Conference Proceedings | 2002



    DWD2 Refractive and diffractive micro-optics in optical interconnects

    Thienpont, H. / Baukens, V. / Buczynski, R. et al. | British Library Conference Proceedings | 2000


    Free-space optical networks using diffractive and refractive micro-optics

    Hall, T. J. / Xu, L. Q. / Jamieson, S. et al. | British Library Conference Proceedings | 1993