High-resolution micromachining of a range of materials (polymers, fused silica, silicon, diamond) has been investigated using both short wavelength (157 nm, F/sub 2/) and short (100 fsec, Ti:Al/sub 2/O/sub 3/) pulse laser radiation. Results using the two sources are compared.
High resolution micromachining using short wavelength and short pulse lasers
2001-01-01
300370 byte
Conference paper
Electronic Resource
English
High Resolution Micromachining Using Short Wavelength and Short Pulse Lasers
British Library Conference Proceedings | 2001
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