The theory, instrumentation and applications of three-dimensional microfabrication are given with a variety of examples. Structures shown include: SEM images of a 10 /spl mu/m bull and a micro-spring; a self-grown filament by the single photon process; self-merging of two fibers, and splitting into many fibers; and a photopolymer photonic crystal from the top and side views.


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    Title :

    Three-dimensional micro-fabrication with two-photon and single-photon polymerization


    Contributors:
    Kawata, S. (author)


    Publication date :

    2001-01-01


    Size :

    128145 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English