A dry etching technique is important for microfabrication of photonic devices, including semiconductor microcavities. Smooth etched sidewalls are needed to form low loss semiconductor microcavities and optical waveguides, because rough surfaces cause noticeable scattering losses. So far, scattering losses in etched reflectors or waveguides caused by interface roughness have been theoretically studied. Scattering losses should be dependent on not only the amplitude of roughness but also its correlation length; however the spatial frequency of the roughness of etched surfaces has not been discussed yet. In this paper, we present a spatial frequency analysis of the measured sidewall roughness of dry etched InP facets, and the correlation length of the sidewall roughness is estimated from the power spectrum to discuss its effect on reflectivities of the etched facet.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Fabrication of InP vertical facets by reactive ion etching and sidewall roughness evaluation for semiconductor microcavities


    Contributors:
    Mitsugi, S. (author) / Koyama, F. (author) / Matsutani, A. (author) / Iga, K. (author)


    Publication date :

    1999-01-01


    Size :

    141423 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Improvement of sidewall roughness in deep silicon etching

    Chabloz, M. / Sakai, Y. / Matsuura, T. et al. | British Library Online Contents | 2000


    Vertical waveguiding in etched semiconductor nonlinear microcavities

    Oudar, J.-L. / Rivera, T. / Optical Society of America | British Library Conference Proceedings | 1998


    Analysis Of Surface Roughness On Semiconductor Laser Etched Facets

    Herrick, R.W. / Sabo, L.G. / Levy, J.L. | IEEE | 1991


    Coupled Semiconductor Microcavities

    Stanley, R. P. / Houdre, R. / Oesterle, U. et al. | British Library Conference Proceedings | 1994


    Sidewall slopes and roughness of SU-8 HARMST

    Vora, K. D. / Shew, B. Y. / Lochel, B. et al. | British Library Online Contents | 2008