The LOCOS technique for formation of SOI optical waveguides has been extended to produce low-loss photonic wire channel waveguides with deep submicron dimensions using a very simple process.


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    Title :

    Deep submicron LOCOS-defined SOI photonic wire waveguides


    Contributors:
    Tam, A. W. (author) / Ibrahim, M. (author) / Lamontagne, B. (author) / Tarr, N. G. (author) / Ye, W. N. (author) / Janz, S. (author) / Danxia Xu, (author)


    Publication date :

    2011-09-01


    Size :

    550741 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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