In this paper we report the demonstration of vertically coupled microdisk resonator structures on SOI substrates, using the technique of SIMOX 3-D sculpting.


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    Title :

    SIMOX 3-D sculpting of vertically-coupled microresonators in silicon


    Contributors:
    Koonath, P. (author) / Indukuri, T. (author) / Jalali, B. (author)


    Publication date :

    2004-01-01


    Size :

    291986 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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