In this paper we report the demonstration of vertically coupled microdisk resonator structures on SOI substrates, using the technique of SIMOX 3-D sculpting.
SIMOX 3-D sculpting of vertically-coupled microresonators in silicon
2004-01-01
291986 byte
Conference paper
Electronic Resource
English
MC2.4 SIMOX 3-D Sculpting of Vertically-Coupled Micro Resonators in Silicon
British Library Conference Proceedings | 2004
SIMOX sculpting of 3-D nano-optical structures
IEEE | 2003
|SIMOX Sculpting of 3-D Nano-optical Structures
British Library Conference Proceedings | 2003
|WO1 High-Q, Vertically-Coupled Microresonators Built by Wafer-Bonding Technique
British Library Conference Proceedings | 2001
|