We demonstrate the operation of an extrinsic Fabry-Perot interferometric sensor modified for the detection of hydrogen gas. The sensor is sputter coated with a 2 /spl mu/m layer of palladium metal which senses as the active sensing element. A theoretical description of the sensor is given, and its operation as a dynamically varying hydrogen sensor is described. A maximum sensitivity of 32 ppm for this first generation sensor is predicted, and a discussion is given concerning methods for improving the resolution in future EFPI hydrogen gas sensors.
Modified extrinsic Fabry-Perot interferometric hydrogen gas sensor
Proceedings of LEOS'94 ; 2 ; 235-236 vol.2
1994-01-01
177838 byte
Conference paper
Electronic Resource
English
Modified Extrinsic Fabry-Perot Interferometric Hydrogen Gas Sensor
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