We use a simple set-up consisting of two multilayer mirrors and a hollow fiber EUV light source to obtain high-resolution EUV images. Magnifications of X20 and X50 are demonstrated.
High-resolution EUV imaging using high harmonic generation
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 1 ; 2 pp. vol.1
2004-01-01
222616 byte
Conference paper
Electronic Resource
English
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