The limits of nanoscale machining with sub-picosecond pulsed lasers are systematically characterized. We propose that the minimum scale is ultimately limited by the valence electron density, thus enabling highly reproducible machining at the nanometer scale.


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    Title :

    Exploring the deterministic nature of femtosecond laser-induced optical breakdown and applications to nanomachining


    Contributors:
    Hunt, A.J. (author) / Joglekar, A. (author) / Meyhofer, E. (author) / Hsiao-hua Liu, (author) / Mourou, G. (author)


    Publication date :

    2004-01-01


    Size :

    202193 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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