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    Title :

    Vertical integration of silica and electro-optic polymer waveguides using grayscale lithography


    Contributors:
    Chang, D.H. (author) / Azfar, T. (author) / Fetterman, H.R. (author) / Cheng Zhang, (author) / Steier, W.H. (author)


    Publication date :

    2003-01-01


    Size :

    262161 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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