Successful two-step X-ray lithography (LIGA) process is demonstrated for the first time for the application to millimeter and submillimeter wave vacuum devices. The experiment of the two-step LIGA-fabricated folded waveguide BWO with a 12kV electron gun using thermionic cathodes and cold cathodes using carbon nanotubes are being investigated at the frequency of 0.1THz.


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    Title :

    Experimental Investigation of Micro-fabricated Folded Waveguide Backward Wave Oscillator for Submillimeter Application


    Contributors:
    So, J. K. (author) / Shin, Y. M. (author) / Jang, K. H. (author) / Won, J. H. (author) / Srivastava, A. (author) / Park, G. S. (author) / Kim, J. H. (author) / Chang, S. S. (author)


    Publication date :

    2006-09-01


    Size :

    1094073 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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