In this paper we demonstrate the development of a new microspectrometer system for the mid-infrared range (2.5 - 6 /spl mu/m). Micromechanical components are used for the system, therefore a very compact and economical spectroscopic device has been realized. First measurement results are reported as well as the functional ability of the device.
Development of a microspectrometer for the infrared range
2002-01-01
171528 byte
Conference paper
Electronic Resource
English
Development of a Microspectrometer for the Infrared Range
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