In this paper we demonstrate the development of a new microspectrometer system for the mid-infrared range (2.5 - 6 /spl mu/m). Micromechanical components are used for the system, therefore a very compact and economical spectroscopic device has been realized. First measurement results are reported as well as the functional ability of the device.


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    Title :

    Development of a microspectrometer for the infrared range


    Contributors:
    Otto, T. (author) / Saupe, R. (author) / Bruch, R. (author) / Gessner, T. (author)


    Publication date :

    2002-01-01


    Size :

    171528 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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