A transfer apparatus that includes a moving unit capable of moving with respect to a base and transferring an article with the moving unit protruding from the base. The transfer apparatus includes a movement regulation unit capable of switching between a first state in which the moving unit is restricted in a reference position and a second state in which the moving unit is allowed to move from the reference position to one of a first direction and a second direction opposite to the first direction and in which movement of the moving unit in the other direction is restricted.


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    Title :

    Transfer apparatus and control method thereof


    Contributors:
    ITO JUNICHI (author)

    Publication date :

    2018-01-30


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66C Krane , CRANES



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