A mask storage device for storing a mask used in lithography comprises a desiccant retainer for receiving a desiccant, the desiccant retainer comprising one or more passages. The mask storage device also comprises a first shell and a second shell, the second shell removably attached to the first shell and arranged to form a sealed space with the first shell in a closed state. The desiccant retainer is positioned in the sealed space. The mask storage device also comprises a gasket positioned between the first shell and the second shell. The gasket is configured to create a sufficiently airtight seal between the first shell and the second shell in the closed state. The one or more passages of the desiccant retainer comprise one or more membranes.
Mask storage device for mask haze prevention
2016-12-27
Patent
Electronic Resource
English
IPC: | B65D Behältnisse zur Lagerung oder zum Transport von Gegenständen oder Materialien [Container], z.B. Säcke, Beutel, Fässer, Flaschen, Dosen, Kästen, Büchsen, Schachteln, Packkörbe, Tonnen, Gläser, Flüssigkeitsbehälter, Trichtersilos, Transportbehälter , CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS / B63C LAUNCHING, HAULING-OUT, OR DRY-DOCKING OF VESSELS , Zuwasserlassen, Trockenstellen, Docken oder Bergen von Schiffen / B65B MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS , Verpackungsmaschinen, -geräte, -vorrichtungen, Verpackungsverfahren für Gegenstände oder Materialien / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES |