A mask storage device for storing a mask used in lithography comprises a desiccant retainer for receiving a desiccant, the desiccant retainer comprising one or more passages. The mask storage device also comprises a first shell and a second shell, the second shell removably attached to the first shell and arranged to form a sealed space with the first shell in a closed state. The desiccant retainer is positioned in the sealed space. The mask storage device also comprises a gasket positioned between the first shell and the second shell. The gasket is configured to create a sufficiently airtight seal between the first shell and the second shell in the closed state. The one or more passages of the desiccant retainer comprise one or more membranes.


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    Title :

    Mask storage device for mask haze prevention


    Contributors:

    Publication date :

    2016-12-27


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    B65D Behältnisse zur Lagerung oder zum Transport von Gegenständen oder Materialien [Container], z.B. Säcke, Beutel, Fässer, Flaschen, Dosen, Kästen, Büchsen, Schachteln, Packkörbe, Tonnen, Gläser, Flüssigkeitsbehälter, Trichtersilos, Transportbehälter , CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS / B63C LAUNCHING, HAULING-OUT, OR DRY-DOCKING OF VESSELS , Zuwasserlassen, Trockenstellen, Docken oder Bergen von Schiffen / B65B MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS , Verpackungsmaschinen, -geräte, -vorrichtungen, Verpackungsverfahren für Gegenstände oder Materialien / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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