A positional relationship detection system includes a measurement unit that measures a positional relationship, a recording unit that records measurement data obtained by the measurement unit in a time series, and a computation unit. The computation unit acquires target time-series data, which is the time-series data of specific detection target amounts indicating the positional relationship, on the basis of the measurement data recorded by the recording unit. The computation unit identifies a first peak and a second peak that are two of a plurality of peaks of a target oscillation that is the oscillation of the detection target amounts appearing in the target time-series data. The computation unit calculates an average value of detection target amounts included in the target time-series data between the first peak and the second peak as a static detection target amount that is a detection target amount after the target oscillation has ceased.


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    Title :

    Positional Relationship Detection System


    Contributors:

    Publication date :

    2025-04-10


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66C Krane , CRANES



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