A trolley includes a trolley body which in turn includes a wheel that is freely movable on a floor, and a first support that supports a component of a substrate processing apparatus that slides in a lateral direction and is pulled out to an outside of the substrate processing apparatus. The trolley also includes a second support that is connected to the trolley body so as to be freely movable between a first position where a width of the trolley in the lateral direction is a first length and a second position where the width in the lateral direction is a second length longer than the first length, and configured to support the component at the second position together with the first support.


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    Title :

    TROLLEY AND METHOD FOR SUPPORTING COMPONENT OF SUBSTRATE PROCESSING APPARATUS


    Contributors:
    FUJITA YUTO (author) / FUJIHARA JUN (author)

    Publication date :

    2022-06-23


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS



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