An inter-floor transport facility in which a raising and lowering transport device is provided for each of the raising and lowering paths that are adjacent to each other. Receiving platforms include a carry in article receiving platform for supporting an article that is being carried in to the floor, a carry out article receiving platform for supporting an article that is being carried out from the floor, and a storage-purpose receiving platform for storing a transported article. On each floor, the carry in article receiving platform and the carry out article receiving platform are so located that the article can be transferred between one transfer device and both of the carry in article receiving platform and the carry out article receiving platform, and the storage-purpose receiving platform is so located that all of the transfer devices can transfer the article to or from the storage-purpose receiving platform.


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    Title :

    Inter-Floor Transport Facility


    Contributors:

    Publication date :

    2016-01-14


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B25J Manipulatoren , MANIPULATORS / B66B Aufzüge , ELEVATORS



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