A substrate transport apparatus having a drive section, an articulated arm operably connected to the drive section, and an end effector connected to the articulated arm, the end effector being configured for holding a substrate thereon and transporting the substrate through articulation of the articulated arm. The end effector is a substantially flat and elongated member, depending from the articulated arm at a base end of the end effector, and extending longitudinally so that the end effector engages edges of the substrate on both proximal and distal sides with respect to the base end. The end effector has a lateral cross section that tapers in a longitudinal portion of the end effector extending between the base end and a distal end of the end effector, the lateral cross section being tapered, along the longitudinal portion, in at least two different directions that are angled and crossing each other.
STACKED PROCESS MODULES FOR A SEMICONDUCTOR HANDLING SYSTEM
2015-08-06
Patent
Electronic Resource
English
IPC: | H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B25J Manipulatoren , MANIPULATORS / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B66C Krane , CRANES / F26B DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM , Trocknen von festen Gütern oder Erzeugnissen durch Entfernen von Flüssigkeit / G06F ELECTRIC DIGITAL DATA PROCESSING , Elektrische digitale Datenverarbeitung |
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