The invention relates to a vibration isolation system (VIS) comprising: —a base (10); —a coupling element (20) to be coupled to a vibration sensitive object; —a vibration isolator (30-34) arranged between the base and the coupling element; —a bellows (50) to be arranged between the VIS coupling element or the vibration isolator and a protective housing (40) surrounding the vibration sensitive object; and —one or more separate damping elements to act on convolutions of the bellows.


    Access

    Download


    Export, share and cite



    Title :

    Vibration isolation system and lithographic apparatus



    Publication date :

    2020-01-28


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    F16J Kolben , PISTONS / G03B APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM , Geräte oder Anordnungen zum Aufnehmen, Projizieren oder Betrachten von Fotografien / B64C AEROPLANES , Flugzeuge / F16F SPRINGS , Federn / G03F Fotomechanische Herstellung strukturierter oder gemusterter Oberflächen, z.B. zum Drucken, zum Herstellen von Halbleiterbauelementen , PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES



    VIBRATION ISOLATION APPARATUS

    European Patent Office | 2021

    Free access

    Stage positioning system and lithographic apparatus

    AANGENENT WILHELMUS HENRICUS THEODORUS MARIA / KOORNEEF LUCAS FRANCISCUS / RUIJL THEO ANJES MARIA et al. | European Patent Office | 2018

    Free access

    Vehicular vibration isolation system and apparatus

    BROWN TODD ALLEN / NORTON RUSS LEE / TSENG ERIC HONGTEI et al. | European Patent Office | 2020

    Free access

    VEHICULAR VIBRATION ISOLATION SYSTEM AND APPARATUS

    BROWN TODD ALLEN / NORTON RUSS LEE / TSENG ERIC HONGTEI et al. | European Patent Office | 2018

    Free access

    VEHICULAR VIBRATION ISOLATION APPARATUS

    BROWN TODD ALLEN / NORTON RUSS LEE / TSENG ERIC HONGTEI et al. | European Patent Office | 2018

    Free access