A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to, form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.


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    Title :

    Substrate transport vacuum platform


    Contributors:

    Publication date :

    2019-12-10


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    B66C Krane , CRANES / B25J Manipulatoren , MANIPULATORS / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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