The present invention provides a transfer unit. In one embodiment, the transfer unit travels on a rail installed along a ceiling of a manufacturing line in which semiconductor process devices are continuously arranged and transfers an article. The transfer unit comprises: a body provided with an actuator; and a travelling wheel rotatably coupled to the body and configured to receive power from the actuator to travel on the rail. The travelling wheel comprises: a wheel core; and a tire fixed to the wheel core along a circumference of the wheel core. The tire is provided with an elastic material and may be provided to engage the wheel core and the tire.

    본 발명은 반송 유닛을 제공한다. 일 실시예에서, 반도체 공정 장치들이 연속적으로 배치된 제조 라인의 천장을 따라 구비되는 레일을 주행하고, 물품을 반송하는 반송 유닛은, 구동기가 제공되는 바디; 및 바디에 회전 가능하게 결합되며 구동기로부터 동력을 전달받아 레일을 주행하는 주행 휠을 포함하고, 주행 휠은, 휠 코어; 및 휠 코어의 둘레를 따라 휠 코어에 고정되는 타이어를 포함하고, 타이어는 탄성을 가지는 소재로 제공되며, 휠 코어와 타이어가 맞물리도록 제공될 수 있다.


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    Title :

    DRIVING WHEEL AND TRANSFERRING UNIT INCLUDING THE SAME


    Additional title:

    주행 휠 및 이를 포함하는 반송 유닛


    Contributors:
    SUNG HYEOK JE (author) / LIM JUNG HYUN (author) / LEE JU HO (author) / NOH KI TAE (author)

    Publication date :

    2022-12-07


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Korean


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66C Krane , CRANES



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