An overhead hoist transport device comprises: a driving rail provided along a ceiling of a semiconductor manufacturing line continuously arranged with semiconductor processing devices; a vehicle including a driving wheel contacting to the driving rail for rotation and a subsidiary wheel provided at the outside of the driving wheel and having a slope in an outer tire thereof, and gripping a cassette to drive along the driving rail; and a subsidiary rail provided to support the subsidiary wheel in a curve section of the driving rail, having the same slope as the subsidiary wheel on an upper surface thereof, and compensating for a difference between linear velocities between inner and outer sides of the driving wheel when the vehicle is driving in the curve section.

    OHT 장치는 반도체 공정 장치들이 연속적으로 배치된 반도체 제조 라인의 천장을 따라 구비되는 주행 레일과, 상기 주행 레일과 접촉하여 회전하는 주행 휠과 상기 주행 휠의 외측에 구비되며, 외륜이 경사지는 보조 휠을 가지며, 카세트를 파지하여 상기 주행 레일을 따라 주행하는 비히클 및 상기 주행 레일의 곡선 구간에 상기 보조 휠을 지지하도록 구비되며, 상면에 상기 보조 휠과 동일한 경사를 가지며, 상기 비히클이 상기 곡선 구간을 주행할 때 상기 주행 휠의 내외측 선속도 차이를 보상하기 위한 보조 레일을 포함할 수 있다.


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    Title :

    OHT Overhead Hoist transport device


    Additional title:

    OHT 장치


    Contributors:

    Publication date :

    2018-06-08


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Korean


    Classification :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B61B RAILWAY SYSTEMS , Eisenbahnanlagen / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen



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