To bring a cylindrical sputtering target down from a vertical attitude to a horizontal attitude while suppressing cracking due to flexure.SOLUTION: There is provided a method of winding an upper end part of a cylindrical sputtering target in a vertical direction with a ring, supporting a lower end part of the cylindrical sputtering target with the ring hung with a suspension rope, and then bringing the cylindrical sputtering target down to a horizontal attitude while rotating the cylindrical sputtering target around the support position thereof as a fulcrum, an interval between the support position of the cylindrical sputtering target and the ring being set within a range in which a cracking index S represented as S=100×σ/σ' is 11.0 or less, where σ represents maximum bending stress that the cylindrical sputtering target has at its target part before reaching the horizontal attitude and σ' represents deflective strength that the cylindrical sputtering target has at its target part.SELECTED DRAWING: Figure 3

    【課題】円筒型スパッタリングターゲットを撓みによる割れの発生を抑制しつつ、垂直姿勢から水平姿勢に倒す。【解決手段】上下方向に沿う円筒型スパッタリングターゲットの上端部にリングを巻回し、該リングを吊りロープで吊り下げた状態で円筒型スパッタリングターゲットの下端部を支持し、その支持位置を支点に円筒型スパッタリングターゲットを回転させながら水平姿勢に倒す方法であって、水平姿勢までに至る際に円筒型スパッタリングターゲットのターゲット部に生じる最大曲げ応力をσ、円筒型スパッタリングターゲットのターゲット部の抗折強度をσ´とした場合にS=100×σ/σ´で表される割れ指数Sが11.0以下となる範囲で円筒型スパッタリングターゲットの前記支持位置と前記リングとの間隔を設定する。【選択図】 図3


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    Title :

    CYLINDRICAL SPUTTERING TARGET BRINGING-DOWN METHOD AND CYLINDRICAL SPUTTERING TARGET BRINGING-DOWN TOOL


    Additional title:

    円筒型スパッタリングターゲット倒し方法及び円筒型スパッタリングターゲット倒し冶具


    Contributors:

    Publication date :

    2021-11-01


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Japanese


    Classification :

    IPC:    C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / B66C Krane , CRANES



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