To make it possible to achieve extension of the range of motion and acceleration in an optical deflection element without impairing processability.SOLUTION: The present optical deflection element is an optical deflection element that rotates a movable unit including a reflection surface to deflect light incident on the reflection surface. The movable unit is formed of a first layer and a second layer, the first layer has the reflection surface, and the entire first layer excluding the reflection surface is formed only one of silicon carbide, alumina, sapphire, silicon nitride, zirconia, diamond, and a compound having those as main components.SELECTED DRAWING: Figure 15
【課題】光偏向素子において加工性を損なわずに可動領域の拡大と高速化の両立を可能とする。【解決手段】本光偏向素子は、反射面を備える可動部を回動させて、前記反射面へ入射する光を偏向する光偏向素子であって、前記可動部は、第1層及び第2層で構成され、前記第1層は前記反射面を有し、該反射面を除く前記第1層の全てが炭化ケイ素、アルミナ、サファイア、窒化ケイ素、ジルコニア、ダイヤモンド、或いはそれらを主材料とする化合物の何れかのみで構成されている。【選択図】図15
OPTICAL DEFLECTION ELEMENT, OPTICAL DEFLECTION SYSTEM, AND OPTICAL SCANNING SYSTEM
光偏向素子、光偏向システム、光走査システム
2020-09-17
Patent
Electronic Resource
Japanese
IPC: | G02B Optische Elemente, Systeme oder Geräte , OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS / B60K Anordnung oder Einbau von Antriebseinheiten oder von Kraft- bzw. Drehmomentübertragungen in Fahrzeugen , ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES / B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente , MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES / F21S Ortsfeste Leuchten , NON-PORTABLE LIGHTING DEVICES / F21V FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF , Funktionsmerkmale oder Einzelheiten von Leuchten oder Beleuchtungssystemen / G01S RADIO DIRECTION-FINDING , Funkpeilung |
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