To provide a capacitance detector which can accurately calculate a grounding pressure distribution of an X-Y directional stress (shearing force) applied in a surface direction parallel to a flat surface.SOLUTION: A complicated and fine electrode pattern is formed on a substrate as a lower electrode, and thus formed lower electrodes are connected to a processing unit by individual AC drive circuits so that an accurate measurement of a pressure distribution can be attained. Also, a plurality of upper electrodes, each divided in two layers and patterned into a linear shape, are arranged so that a stress, in other words the shearing force distribution, in a surface direction (X, Y-direction) parallel to a flat surface can be measured.SELECTED DRAWING: Figure 1
【課題】本発明は、平面に対して平行な面方向に加わるXY軸方向の応力(せん断力)の接地圧分布を高精度に算出できる静電容量検出装置を提供することを目的とする。【解決手段】複雑で微細な電極パターンを下部電極として基板上に形成し、その下部電極の各々が個別ACドライブ回路を介して処理部と接続することで、高精度に圧力分布を測定できるようにした。また上部電極を、二層に分けかつ線状にパターン化して複数配置することにより、平面に対して平行な面方向(X,Y方向)の応力,即ちせん断力の分布についても測定できるようにした。【選択図】図1
CAPACITANCE DETECTOR
静電容量検出装置
2020-09-17
Patent
Electronic Resource
Japanese
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