To provide a movable device at a low cost.SOLUTION: A movable device according to an aspect of a disclosed technique comprises a movable part having a reflective surface, a pair of drive beams having one ends connected to the movable part and supporting the movable part rotatably while sandwiching the movable part therebetween, and a fixing part connected to the other ends of the pair of drive beams and fixing the pair of drive beams. The movable part includes a support layer and a movable layer provided in a lamination direction of the support layer. The fixing part includes a fixing support layer composed of the same material as that of the support layer. When thickness of the support layer is t, thickness of the movable layer is tand thickness of the fixing support layer is t, t≥tand t

    【課題】可動装置を低コスト化すること。【解決手段】開示の技術の一態様に係る可動装置は、反射面を備える可動部と、前記可動部にそれぞれの一端が接続され、前記可動部を挟んで、前記可動部を回動可能に支持する1対の駆動梁と、前記1対の駆動梁のそれぞれの他端に接続され、前記1対の駆動梁を固定する固定部と、を有し、前記可動部は、支持層と、前記支持層の積層方向に設けられた可動層と、を含み、前記固定部は、前記支持層と同じ材料で構成された固定支持層を含み、前記支持層の厚みをt1とし、前記可動層の厚みをt2とし、前記固定支持層の厚みをt3とした場合に、t1≧t2であり、かつt1<t3である。【選択図】図16


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    Title :

    MOVABLE DEVICE, IMAGE PROJECTION DEVICE, HEAD-UP DISPLAY, LASER HEAD LAMP, HEAD-MOUNT DISPLAY, OBJECT RECOGNITION DEVICE AND VEHICLE


    Additional title:

    可動装置、画像投影装置、ヘッドアップディスプレイ、レーザヘッドランプ、ヘッドマウントディスプレイ、物体認識装置、及び車両


    Contributors:

    Publication date :

    2020-06-04


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Japanese


    Classification :

    IPC:    G02B Optische Elemente, Systeme oder Geräte , OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS / B60K Anordnung oder Einbau von Antriebseinheiten oder von Kraft- bzw. Drehmomentübertragungen in Fahrzeugen , ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES / B60R Fahrzeuge, Fahrzeugausstattung oder Fahrzeugteile, soweit nicht anderweitig vorgesehen , VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR / B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente , MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES / G01S RADIO DIRECTION-FINDING , Funkpeilung / H04N PICTORIAL COMMUNICATION, e.g. TELEVISION , Bildübertragung, z.B. Fernsehen