Systems and methods are disclosed that address the problem of large-scale optical manufacturing of microstructures. The systems and methods utilize one or more optical processing systems to generate a first set of alignment marks in a first region on a surface. The optical processing systems then move their focus to a second region on the surface. The second region generally partially overlaps the first region such that the optical processing systems can detect the location of the first set of alignment marks. The optical processing systems then generate a second set of alignment marks based on the location of the first set of alignment marks. This process is repeated in an iterative manner until alignment marks have been generated on all regions of the surface. The alignment marks can be used to optically align one or more optical processing systems configured to produce 3D structures on the surface.
METHODS FOR LARGE-SCALE OPTICAL MANUFACTURING
VERFAHREN ZUR GROSSFLÄCHIGEN OPTISCHEN HERSTELLUNG
PROCÉDÉS DE FABRICATION OPTIQUE À GRANDE ÉCHELLE
2024-05-08
Patent
Electronic Resource
English
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