This invention introduces a novel capacitive micromachined ultrasonic transducer (CMUT) array employing an additional electrically-addressable conductive shield that isolates each array element individually, hence the novel array is coined as Faraday Caged CMUT array. The state of this conductive shield corresponding to each array element can be set as floating for reduced parasitic and cross-coupling capacitance or grounded for reduced electrical crosstalk. Perpetual, reliable operation in floating state without the risk of catastrophic dielectric electric field breakdown event is enabled by the self-discharging mechanism through diamond emitters featuring high field emission efficiency and acting as lightning rods in a cavity. The lightning rod structure features a movable diamond membrane, which deflects towards the diamond emitter due to electrostatic force (acting as a charge-controlled capacitive device) closing the gap to facilitate the safe intermittent discharging.
ELECTRICAL CROSSTALK REDUCTION FOR A CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER ARRAY
REDUZIERUNG DES ELEKTRISCHEN ÜBERSPRECHENS FÜR EINE KAPAZITIVE MIKROBEARBEITETE ULTRASCHALLWANDLERANORDNUNG
RÉDUCTION DE DIAPHONIE ÉLECTRIQUE POUR UN RÉSEAU DE TRANSDUCTEURS ULTRASONORES MICRO-USINÉS CAPACITIFS
2024-03-20
Patent
Electronic Resource
English
IPC: | B60B VEHICLE WHEELS , Räder für Fahrzeuge |
ELECTRICAL CROSSTALK REDUCTION FOR A CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER ARRAY
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