The invention belongs to the technical field of micro-nano electronic devices, and particularly relates to an hourglass type steam micro-thruster nozzle. Comprising an inlet cavity, an outlet cavity and a communicating hole communicating the inlet cavity with the outlet cavity, the inlet cavity and the outlet cavity are each of a trumpet-shaped structure, the diameter of the inlet cavity is gradually reduced to the communicating hole from an inlet, and the wall of the inlet cavity is sequentially composed of a heating layer, an insulating silicon oxide layer and a silicon substrate layer from inside to outside; the diameter of the outlet cavity is gradually increased from the communicating hole to the outlet, and the wall of the outlet cavity is sequentially composed of an insulating silicon oxide layer and a silicon substrate layer from inside to outside. A micro-nano-scale metal film is adopted as a heating layer on the cavity wall of an inlet cavity, and the micro-nano-scale metal film and the inlet cavity with the diameter gradually reduced from an inlet to a communicating hole act together to control vacuum boiling of deionized water so as to generate micro-Newton-scale thrust. The device has the advantages of being high in integration level, low in power consumption and micro in impulse, and thrust generated by the device is at the micro-Newton level.

    本发明属于微纳电子器件技术领域,特别涉及一种沙漏型蒸汽微推力器喷嘴。包括入口腔室、出口腔室、以及连通入口腔室和出口腔室的连通孔,入口腔室与出口腔室均采用喇叭状结构,入口腔室的直径从入口开始逐渐缩小至连通孔处,入口腔室壁由内向外依次由发热层、绝缘氧化硅层和硅基底层构成;出口腔室的直径从连通孔处开始逐渐增大至出口处,出口腔室壁由内向外依次由绝缘氧化硅层和硅基底层构成。通过在入口腔室的腔室壁采用微纳米级金属薄膜作为发热层,与直径从入口开始逐渐缩小至连通孔处的入口腔室共同作用,控制去离子水的真空沸腾来实现微牛顿级别的推力产生。本发明具有高集成度、低功耗、微冲量的特点,且其产生的推力处于在微牛顿级别。


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    Title :

    Hourglass type steam micro-thruster nozzle


    Additional title:

    一种沙漏型蒸汽微推力器喷嘴


    Contributors:
    QI KANGCHENG (author) / CHEN LIYU (author) / WANG XIAOJU (author)

    Publication date :

    2025-04-04


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B64G Raumfahrt , COSMONAUTICS / B82Y Bestimmter Gebrauch oder bestimmte Anwendung von Nanostrukturen , SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES / B05B Sprühvorrichtungen , SPRAYING APPARATUS



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