The invention provides a simple assembly mechanism for a single crystal furnace, and belongs to the technical field of semiconductor manufacturing equipment.The simple assembly mechanism comprises a lifting mechanism, a rotating mechanism and a clamping mechanism, the lifting mechanism comprises a mounting column, a stepping motor is fixedly mounted at the top end of the mounting column, and the output end of the stepping motor is in transmission connection with a driving straight gear through a coupler; the front side of the driving straight gear is in meshed connection with a driven straight gear, the bottom end of the driven straight gear is fixedly connected with a threaded rod, the surface of the threaded rod is in threaded connection with a lifting block, and the front end of the lifting block is fixedly connected with a lifting frame. According to the invention, the problems of complex operation, low efficiency and insufficient safety of the traditional single crystal furnace in installation, overhaul and maintenance are solved, and efficient, safe and stable operation is realized through height adjustment, direction adjustment, damping buffering and automatic limiting clamping.
本发明提供一种用于单晶炉的简易装配机构,属于半导体制造设备技术领域,包括升降机构、旋转机构和夹持机构,升降机构包括安装柱,所述安装柱的顶端固定安装有步进电机,所述步进电机的输出端通过联轴器传动连接有主动直齿轮,所述主动直齿轮的前侧啮合连接有从动直齿轮,所述从动直齿轮的底端固定连接有螺纹杆,所述螺纹杆的表面螺纹连接有升降块,所述升降块的前端固定连接有升降架。本发明解决了传统单晶炉在安装、检修及维护中操作复杂、效率低、安全性不足的问题,通过高度调节、方向调整、减震缓冲及自动限位夹持实现了高效、安全、稳定的操作。
Simple assembling mechanism for single crystal furnace
一种用于单晶炉的简易装配机构
2025-03-28
Patent
Electronic Resource
Chinese
IPC: | F16F SPRINGS , Federn / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last |
Transfer trolley for crystal bars of single crystal furnace
European Patent Office | 2022
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