The invention discloses an automatic carrier for a wafer cassette storage system, which comprises a Z-axis assembly, a pick-and-place unit is arranged on the Z-axis assembly, the pick-and-place unit is connected with the Z-axis assembly in an up-and-down sliding manner, and a power part for driving the pick-and-place unit to slide up and down is arranged in the Z-axis assembly; the power part comprises a driven chain wheel and a driving chain wheel which are located at the upper end and the lower end of the Z-axis assembly, a chain is connected to the driven chain wheel and the driving chain wheel in a winding mode, and the two ends of the chain are connected with the taking and placing unit after winding around the driven chain wheel and the driving chain wheel correspondingly. The stability of chain movement is guaranteed through the multiple guide chain wheels, then the taking and placing assembly can be driven to accurately move up and down, meanwhile, the linear guide rails are arranged, vibration can be greatly restrained through guiding and transmission directions of the linear guide rails and the transmission chain wheels, damage to products in the wafer box due to vibration is reduced, and the production efficiency is improved. And the yield of products is improved.
本发明公开了一种用于晶圆盒存储系统的自动搬运车,包括Z轴组件,Z轴组件上设有取放单元,取放单元与所述Z轴组件上下滑动连接,所述Z轴组件内设有用于驱动所述取放单元上下滑动的动力部;所述动力部包括位于所述Z轴组件上下两端的从动链轮、主动链轮,所述从动链轮、主动链轮上绕接有链条,所述链条的两端分别绕过所述从动链轮、主动链轮后均与所述取放单元连接,本申请通过传动链条作为传动组件,并且通过多个导向链轮保证链条运动的稳定性,进而可以带动取放组件精准的上下移动,同时还设有直线导轨,通过直线导轨和传动链轮的导向以及传动方向,可以极大的抑制震动的产生,减少晶圆盒内的产品因震动发生损坏,提升产品的良品率。
Automatic carrier for wafer cassette storage system
一种用于晶圆盒存储系统的自动搬运车
2025-02-28
Patent
Electronic Resource
Chinese
IPC: | B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / B08B Reinigen allgemein , CLEANING IN GENERAL / B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen |