The invention discloses a cover opening structure and a method for opening and closing a vacuum chamber by applying the cover opening structure, the cover opening structure is used for opening or closing a cavity body of the vacuum chamber, and the cover opening structure comprises an opening and closing module for driving a cover body of the vacuum chamber to move along the height direction of the cavity body to open or close the cavity body; the sliding module is arranged on the cavity, abuts against the opening and closing module and is used for enabling the opening and closing module to slide in the length direction or the width direction of the cavity; and the movable lifting module is used for bearing and driving the opening and closing module and the cover body to move close to or far away from the cavity. According to the cover opening structure, the cavity can be opened, the cover body can be moved to the movable lifting module under the cooperation of the opening and closing module and the sliding module, the cover body is moved to the idle position through the movable lifting module, a larger operation space is provided for operators, and the use experience is improved.

    本披露公开了一种开盖结构以及应用其开合真空腔室的方法,其中开盖结构用于打开或者关闭真空腔室的腔体,所述开盖结构包括:开合模块,带动真空腔室的盖体沿所述腔体的高度方向移动打开或者关闭所述腔体;滑动模块,其设置在所述腔体上且与所述开合模块抵接,并用于使开合模块沿腔体的长度方向或者宽度方向滑动;以及移动升降模块,用于承接并带动所述开合模块和所述盖体靠近或者远离所述腔体移动。本披露提供的开盖结构,不但能够将腔体打开,还能够将盖体在开合模块和滑动模块的配合下移动到移动升降模块上,并通过移动升降模块将盖体移动到闲置位置处,为操作人员提供更大的操作空间,提高了使用体验。


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    Title :

    Cover opening structure and method for opening and closing vacuum chamber by applying cover opening structure


    Additional title:

    一种开盖结构以及应用其开合真空腔室的方法


    Contributors:
    HUO ZHIJUN (author) / JIN JIANGAO (author) / HE WENNAN (author) / GAO WENQUAN (author)

    Publication date :

    2025-02-11


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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