The invention discloses a silicon carbide chamber graphite piece maintenance transfer device which comprises a transfer trolley, transfer dies and a protective cover, at least two trays arranged up and down are arranged on the transfer trolley, and one transfer die is placed in each tray. Each transfer mold is provided with a plurality of containing grooves which are used for containing different types of graphite pieces and matched with the graphite pieces in shape, the containing grooves and the graphite pieces in the containing grooves are in an attached state, and each transfer mold is covered with a protective cover to cover the corresponding containing groove. Each graphite piece is placed in the corresponding containing groove in the transfer mold, the graphite pieces do not make contact with one another, the graphite pieces do not make contact with the transfer trolley, the graphite pieces do not collide with the transfer trolley in the transfer process, the stable transportation environment ensures that the physical structure of the graphite pieces is complete, and the service life of the graphite pieces is prolonged; and the protective cover covers the graphite piece, so that the surface of the graphite piece is prevented from being stained with impurities such as dust and chippings in the transfer process.
本发明公开了一种碳化硅腔室石墨件保养用的转运装置,包括转运车、转运模具和防护盖,转运车上设有至少两个呈上下排列的托盘,每个托盘内放置一个转运模具,每个转运模具上设有多个用于放置不同类型石墨件且与其形状匹配的容纳槽,容纳槽与其内的石墨件处于贴合状态,每个转运模具上覆盖有一个防护盖以将容纳槽盖住,本发明设计了与石墨件配合的转运模具,每个石墨件放置在转运模具上对应的容纳槽内,石墨件之间不接触,石墨件与转运车之间也不接触,石墨件不会在转运过程中与转运车发生磕碰,稳定的运输环境确保了石墨件的物理结构完整,延长了石墨件的使用寿命;防护盖将石墨件罩住,避免在转运过程中石墨件的表面被沾染灰尘、碎屑等杂质。
Transfer device for maintenance of silicon carbide chamber graphite piece
碳化硅腔室石墨件保养用的转运装置
2025-01-28
Patent
Electronic Resource
Chinese
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