The invention relates to the technical field of wafer carrying, and particularly discloses a wafer carrying device with an anti-collision structure, which comprises a cubic frame, and four cross rods are arranged among four stand columns of the cubic frame; the supporting plate is fixedly installed among the four transverse rods, and a pushing and holding device is arranged at the bottom end of the supporting plate; the four damping air bags are distributed in an array mode, and the damping air bags are installed at the top end of the supporting plate; the bearing table is installed at the top end of the damping air bag, and the bearing table is used for placing a wafer boat box; the anti-rollover transverse frame is mounted on the inner wall of the top frame of the cubic frame; the lifting arm device comprises a tension spring, and a plurality of first supporting rings are arranged at the top end of the bearing table. The anti-collision performance of the carrying device is improved, the damping effect on wafers with different weights is improved, and the carrying device is provided with an automatic leveling structure for the wafers.
本发明涉及晶圆搬运技术领域,具体公开了一种具有防碰撞结构的晶圆搬运装置,包括立方架,所述立方架的四个立柱之间设置有四个横杆;支撑板,所述支撑板固定安装于四个横杆之间,所述支撑板的底端设置有推握装置;减震气囊,四个所述减震气囊呈阵列分布,所述减震气囊安装于支撑板的顶端;承载台,所述承载台安装于减震气囊的顶端,所述承载台用于放置晶舟盒;防侧翻横框,所述防侧翻横框安装于立方架的顶框内壁;吊臂装置,所述吊臂装置包括拉簧,所述承载台的顶端设置有多个第一支撑环。本发明提高了搬运装置的防碰撞性,提高了对不同重量晶圆的减震效果,具有了对晶圆的自动调平结构。
Wafer carrying device with anti-collision structure
一种具有防碰撞结构的晶圆搬运装置
2024-12-27
Patent
Electronic Resource
Chinese
IPC: | B62B Von Hand bewegte Fahrzeuge, z.B. Handkarren oder Kinderwagen , HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS |
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