The invention discloses a silicon wafer carrying plate, a supporting shaft mechanism, a lifting shaft mechanism and a power mechanism. The supporting shaft mechanism, the lifting shaft mechanism and the power mechanism are arranged around the silicon wafer carrying plate in a double-group symmetrical or multi-surface combined mode. The lifting shaft mechanism is used as lifting power, the supporting shaft mechanism is used as a cache supporting position, the lifting shaft mechanism is driven to vertically move up and down during working, the silicon wafer carrier plate is lifted to the height of the adjacent upper layer from the bottom layer, at the moment, the silicon wafer carrier plate is supported by the supporting shaft, and the lifting shaft mechanism descends to the original position; through several times of reciprocation, the silicon wafer carrier plates are jacked to the uppermost position layer by layer, the purpose of lifting the silicon wafer carrier plates is achieved, the buffer space of the carrier plates can be effectively increased in a future production line, the equipment space can be effectively reduced, workshop space occupation can be reduced, and the silicon wafer carrier plate jacking device has great significance on future industry development and has good application prospects.

    本发明公开了一种包括硅片载板、支撑轴机构、提升轴机构和动力机构,支撑轴机构、提升轴机构和动力机构围绕硅片载板双组对称或多面组合形式设置。本发明利用位于提升轴机构为提升动力,利用位于支撑轴机构为缓存支撑位,工作时驱动提升轴机构做垂直上下运动,从底层开始将硅片载板定升到临近的上一层高度,此时硅片载板被支撑轴支撑,提升轴机构下降到原来位置,通过几次往复,硅片载板被逐层顶升到最上位,实现提升硅片载板的目的,可在未来产线中有效增加载板的缓存空间,可以有效减小设备空间,减少车间空间占用,对未来行业发展有着重大意义,具有不错的应用前景。


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    Title :

    Pitch type carrier plate lifting mechanism


    Additional title:

    一种节距式载板升降机构


    Contributors:
    GUO YANHENG (author) / LIAN XIAOHONG (author) / SU JINFA (author)

    Publication date :

    2024-09-24


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES



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