The invention discloses a large-diameter deposition furnace charging clamp, and relates to the technical field of deposition furnace charging devices. Comprising at least three hoisting rods (4), clamping feet (5) installed at the lower ends of the hoisting rods (4), a hoisting frame (1) rotationally connected with the upper ends of the hoisting rods (4), a closed synchronous belt (2) connected with teeth at the upper ends of the hoisting rods (4) in a meshed mode and a rotating disc (6) meshed with the synchronous belt (2), and at most two hoisting rods (4) are located on the same straight line. And the rotating disc (6) rotates to drive the hoisting rods (4) and the clamping feet (5) to synchronously rotate, so that the clamping feet (5) support the hoisting disc or are separated from the hoisting disc. The charging clamp for the large-diameter deposition furnace is suitable for charging and discharging of the large-diameter vapor deposition furnace, and is high in efficiency and safety.
本发明公开了一种大直径沉积炉装炉夹具,涉及沉积炉装炉装置技术领域,包括至少三根吊装杆(4)、安装于所述吊装杆(4)下端的夹脚(5)、与每根所述吊装杆(4)上端转动连接的吊装框架(1)、与所有所述吊装杆(4)上端齿牙啮合连接的一条闭合同步带(2)、与所述同步带(2)啮合的旋转盘(6),至多有两根所述吊装杆(4)在一条直线上,所述旋转盘(6)转动带动所述吊装杆(4)和夹脚(5)同步转动,以使所述夹脚(5)托起吊装盘或者脱离吊装盘。该大直径沉积炉装炉夹具适用于大直径气相沉积炉装出炉,效率和安全性较高。
Fixture for charging large-diameter deposition furnace
一种大直径沉积炉装炉夹具
2024-06-21
Patent
Electronic Resource
Chinese
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