The invention provides a self-adaptive leveling method for a three-axis air floating rotary table with a variable topological structure. The adaptive leveling method for the three-axis air-floating rotary table with the variable topological structure comprises the following steps: step 1, carrying out X-Y axial coarse leveling on the rotary table by utilizing real-time state closed-loop feedback control, and requiring the leveling table to have higher response speed and larger effective stroke in the stage; in the second step, real-time dynamic micro-compensation is carried out through self-adaptive dynamic three-axis fine leveling control, and the leveling platform is required to have higher compensation precision at the stage. According to the self-adaptive leveling method for the three-axis air floating rotary table with the variable topological structure, the rotary table can be rapidly and automatically balanced in a high-precision mode, and by reducing hardware configuration of the rotary table, the cost can be saved, and the space occupancy rate of the table top can be reduced.
本发明提出一种变拓扑结构的三轴气浮转台自适应调平方法。所述变拓扑结构的三轴气浮转台自适应调平方法,第一步利用实时状态闭环反馈控制进行转台XY轴向粗调平,此阶段要求调平滑台具有更高的响应速度和更大的有效行程;第二步采用自适应动态三轴精调平控制进行实时动态微补偿,此阶段要求调平滑台具有更高的补偿精度。本发明提出的一种变拓扑结构的三轴气浮转台自适应调平方法,即可以实现转台快速、高精度自动调平衡,又可以通过减少转台的硬件配置,节约成本、降低台面空间占用率。
Adaptive leveling method for three-axis air-floating turntable with variable topological structure
一种变拓扑结构的三轴气浮转台自适应调平方法
2024-03-12
Patent
Electronic Resource
Chinese
IPC: | B64G Raumfahrt , COSMONAUTICS |
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